| 設備技術參數 Equipment technical parameters |
| 真空室材質 Vacuum chamber material | 不銹鋼、碳鋼 Stainless steel, carbon steel |
| 蒸鍍方式 Metalizing mode | 單面鍍膜、雙面鍍膜 Single side coating, double side coating |
| 蒸鍍模式 Metalizing model | 感應蒸發 Induction of evaporation |
| 有效鍍寬 Effective width of coating | 500mm-1700mm |
| 最大卷徑 Max.rolling diameter | Φ500－Φ1300mm |
| 卷繞速度 Wind speed | 1m/min－15m/min（2m/min－30m/min） 1m/min－15m/min（2m/min－30m/min） |
| 可鍍材料 Can be plated material | 銅、鉻、鈦、銀等 Cu, Cr, Ti, Ag, etc |
| 鍍膜基材 Coating substrate | 海綿、薄膜、布等卷材 Sponge, film, cloth, etc |
| 常用真空抽氣時間 Commonly used vacuum extraction time | 清潔容器抽至9×10-3pa≤30min Clean the container until 9×10-3pa≤30min |
| 極限真空抽氣時間 Limit vacuum time | 清潔空容器抽至7×10-4Pa≤24h Clean empty containers and pump until 7×10-4pa≤24h |
| 極限壓力（清潔、空載） Extreme pressure (clean, no load) | 7×10-4Pa |
| 水冷輥直徑 Diameter of water-cooled roll | φ250mm-φ1200mm |
| 水冷輥冷凍工作溫度 Water cooling roller freezing working temperature | -25℃～80℃ |
| 靶體形式 The target body form | 平面靶、圓柱靶 Plane target, cylindrical target |
| 磁控靶電源 Magnetic target power supply | 直流、中頻 Dc, if |
| 磁控靶工作壓力 Magnetic target operating pressure | 2×10-1Pa |
| 磁控靶工作氣體 Magnetically controlled target working gas | 氬氣、氧氣，純度99.99% Ar, O2, 99.99% purity |
| 磁控靶工作氣體控制方式 Magnetic target working gas control mode | 質量流量控制器控制 Mass flow controller control |
| 卷繞系統 The winding system | 采用原裝西門子恒張力全自動收放卷系統 The original Siemens constant tension automatic winding and unwinding system is adopted |
| 舒展系統 Stretch system | 電動可調360o舒展系統 Electrically adjustable 360 ° stretch system |
| 驅動電機 Drive motor | 西門子電機 Siemens motor |
| 氣脹軸 Inflatable shaft | 脹塊式、鍵條式等 Bulk-type, key-bar type, etc |
| 氣脹軸直徑 Inflation axis diameter | 3″、 6″氣脹軸 3 ", 6 "gas expansion axis |
| 真空系統 Vacuum system | ZJ1200羅茨泵，速度為1200升/秒 ZJ1200 roots pump, speed 1200 L/S |
| ZJ3000羅茨泵，速度為3000升/秒 ZJ3000 roots pump with a speed of 3000 L/S |
| 2H150滑閥泵，每臺速度150升/秒 2H150 slide valve pump, 150 L/S per set |
| 2X-30旋片泵，每臺速度 30升/秒 2X-30 rotary vane pump, each speed of 30 L/S |
| 深冷捕集器 Cryogenic trap |
| 功率 power | 100KW-400KW |
| 電源 The power supply | 380V 三相五線 380V Three phase five wire |
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